ION SUPPLY DEVICE AND ION SUPPLY METHOD
PROBLEM TO BE SOLVED: To provide an ion supply device which makes the charged particle continuously hit a target, and makes the target attract and absorb the charged particles as many as possible, and makes the target continuously act (absorb) the charged particle forming substance. SOLUTION: The io...
Saved in:
Main Author | |
---|---|
Format | Patent |
Language | English |
Published |
28.02.2003
|
Edition | 7 |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | PROBLEM TO BE SOLVED: To provide an ion supply device which makes the charged particle continuously hit a target, and makes the target attract and absorb the charged particles as many as possible, and makes the target continuously act (absorb) the charged particle forming substance. SOLUTION: The ion supply device comprises a charged particle (ion) generating means 2 emitting charged particles 1 against a target 3, and an electric potential keeping means 4 keeping the electric potential of the target 3 in order to make the target 3 continuously attract/absorb the charged particles 1. |
---|---|
Bibliography: | Application Number: JP20010244628 |