CORE FOR ELECTROMAGNETIC ACTUATOR, ELECTROMAGNETIC ACTUATOR, STATE APPARATUS USING THE SAME, ALIGNER AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a core for electromagnetic actuators which is never deformed or never obliquely inclined when being mounted on other apparatus (e.g. members of a stage, etc.). SOLUTION: Non-magnetic block mounting members 13, 14 are bonded to a laminate block 12 of a plurality of st...

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Bibliographic Details
Main Authors IRIE NORIYUKI, KIKUCHI TOSHIHIDE
Format Patent
LanguageEnglish
Published 24.01.2003
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
INDUCTANCES
INSTRUMENT DETAILS
MAGNETS
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
SEMICONDUCTOR DEVICES
TRANSFORMERS
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Summary:PROBLEM TO BE SOLVED: To provide a core for electromagnetic actuators which is never deformed or never obliquely inclined when being mounted on other apparatus (e.g. members of a stage, etc.). SOLUTION: Non-magnetic block mounting members 13, 14 are bonded to a laminate block 12 of a plurality of stacked and adhered magnetic thin plates 11. The block mounting member is bonded to at least one of the two thin plates at both ends of the laminate block and has a reference plane 13a at a predetermined angle to at least one laminate plane 12 of the laminate block.
Bibliography:Application Number: JP20010209136