SYSTEM FOR PRODUCING SEMICONDUCTOR

• Main Author: TATENO HIDETO
• Format: Patent
• Language: English
• Published: 06.12.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a system for producing a semiconductor arranged such that when an over temperature preventive circuit detects over temperature of piping, that detection is held until an interlock circuit is reset and an alarm is generated continuously. SOLUTION: When an over temperature preventive circuit 10 detects an over temperature and the power supply to a piping heater 11 is interrupted, an over temperature detector also detects an over temperature and that detection is held until an interlock circuit 20 is reset. Even if the temperature of piping drops and the over temperature preventive circuit does not detect the over temperature, the interlock circuit holds the over temperature until it is reset. When the interlock circuit is utilized for generating an alarm, an alarm is delivered continuously and independently from operation of the over temperature preventive circuit until the interlock circuit is reset. Consequently, an operator can recognize an abnormality immediately to take an appropriate countermeasure.