MULTILAYER BLOCK AND ITS PRODUCING METHOD, ELECTROMAGNETIC ACTUATOR, STAGE UNIT AND ALIGNER COMPRISING IT, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

• Main Authors: IRIE NORIYUKI, KIKUCHI TOSHIHIDE
• Format: Patent
• Language: English
• Published: 20.09.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INDUCTANCES; MAGNETS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; SEMICONDUCTOR DEVICES; TRANSFORMERS

PROBLEM TO BE SOLVED: To provide a multilayer block comprising a large number of thin magnetic sheets laid in layers in which the thin film is not stripped even if the multilayer block is polished obliquely to the layer direction and screws are prevented from loosening when the multilayer block is f...