MULTILAYER BLOCK AND ITS PRODUCING METHOD, ELECTROMAGNETIC ACTUATOR, STAGE UNIT AND ALIGNER COMPRISING IT, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To provide a multilayer block comprising a large number of thin magnetic sheets laid in layers in which the thin film is not stripped even if the multilayer block is polished obliquely to the layer direction and screws are prevented from loosening when the multilayer block is f...

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Bibliographic Details
Main Authors IRIE NORIYUKI, KIKUCHI TOSHIHIDE
Format Patent
LanguageEnglish
Published 20.09.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDUCTANCES
MAGNETS
SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
SEMICONDUCTOR DEVICES
TRANSFORMERS
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Summary:PROBLEM TO BE SOLVED: To provide a multilayer block comprising a large number of thin magnetic sheets laid in layers in which the thin film is not stripped even if the multilayer block is polished obliquely to the layer direction and screws are prevented from loosening when the multilayer block is fixed to other apparatus. SOLUTION: The electromagnetic actuator 100 comprises an I core 20 and an E core 30. The multilayer block 22 employed in the I type core 20 comprises a plurality of thin magnetic sheets 21 laid in layers. The thin magnetic sheet 21 at one end of the multilayer block 22 is provided with a block fixing part 23 comprising a nonmagnetic body also serving as a securing part at the time of polishing. The multilayer plane 22A of the multilayer block 22 has an arcuate cross-section perpendicular to the layer direction. In the I core 20 employing the multilayer block 22, distance to the E core 30 is kept constant even if the I core 20 tilts against the E core 30.
Bibliography:Application Number: JP20010061867