ACTUATOR, GAP MEASURING APPARATUS, NONCONTACT COPYING APPARATUS, SIX DEGREE OF FREEDOM TABLE DRIVER, ALIGNER AND METHOD FOR FABRICATING DEVICE

PROBLEM TO BE SOLVED: To provide a small actuator having no variation of characteristics. SOLUTION: Magnetic planar bodies 2a and 2b are fixed to the opposite sides of a nonmagnetic planar body 1 by means of bolts 3. E type electromagnets 4a and 4b are disposed such that the planar bodies 2a and 2b...

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Bibliographic Details
Main Author KIKUCHI TOSHIHIDE
Format Patent
LanguageEnglish
Published 23.08.2002
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
GENERATION
HOLOGRAPHY
MATERIALS THEREFOR
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a small actuator having no variation of characteristics. SOLUTION: Magnetic planar bodies 2a and 2b are fixed to the opposite sides of a nonmagnetic planar body 1 by means of bolts 3. E type electromagnets 4a and 4b are disposed such that the planar bodies 2a and 2b face each other. When the E type electromagnets 4a and 4b are fixed to a common base, relative positional relation of the E type electromagnets 4a, 4b and the planar body 1 can be varied by adjusting the currents being fed to the coils of these electromagnets. Consequently, it can be used as a one- dimensional actuator.
Bibliography:Application Number: JP20010029952