CONVERGENT LIGHT PHASE DIFFERENCE MICROSCOPIC APPARATUS AND CONVERGENT LIGHT PHASE DIFFERENCE MICROSCOPIC OBSERVATION METHOD

PROBLEM TO BE SOLVED: To provide an optical microscopic apparatus which makes the diffracted image of phase object having a sufficient contrast observable without depending up samples and a microscopic observation method using this optical microscopic apparatus. SOLUTION: This optical microscopic ap...

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Bibliographic Details
Main Authors MINOBE MASAO, UCHIUMI SHINYA
Format Patent
LanguageEnglish
Published 09.08.2002
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide an optical microscopic apparatus which makes the diffracted image of phase object having a sufficient contrast observable without depending up samples and a microscopic observation method using this optical microscopic apparatus. SOLUTION: This optical microscopic apparatus has illumination means 3 for irradiating the convergent light converging to one point 4 of space as illumination light, a monochromatic coloring device 17 for making the illumination light monochromatic just before the test article 6, a test article stage 5 to be loaded with the test article just before the convergence point, an objective lens 10 arranged to once converge the illumination light transmitted through or reflected by the test article at the convergence point, then making this light incident on the lens and a phase plate 15 installed on a diffraction image plane orthogonal with an optical axis 7 of the illumination light inclusive of the convergence point to delay the phase of the direct light made incident on the point near the center of the diffracted image formed on the diffraction image plane without being diffracted or scattered by the test article or the diffracted light or scattered light which is diffracted or scattered by the test article and is made incident on the point exclusive of the point near the center of the diffracted image.
Bibliography:Application Number: JP20010016103