TEMPERATURE CONTROL SYSTEM

• Main Author: OGAWARA YOSHIO
• Format: Patent
• Language: English
• Published: 12.07.2002
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HEAT EXCHANGE IN GENERAL; HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS,IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; WEAPONS

PROBLEM TO BE SOLVED: To provide a temperature control system for highly accurately controling a temperature of a fluid for a temperature control being used in semiconductor manufacturing equipment. SOLUTION: A tank T is provided with a fluid for the temperature control for the semiconductor manufacturing equipment, a reservoir room 19 to keep the fluid for the temperature control, a heat exchanger 20 for circulating the fluid for the temperature control between the reservoir room 19 and the heat exchanger 20, circulation routes 21, 22 for connecting between the reservoir room 19 and the heat exchanger 20, a pump 23 at the circulation routes 21, 22 to circulate the fluid a sensor 10 for measuring the temperature of the fluid in the reservoir room 19, and a temperature controller 25 for connecting the sensor 10 and the heat exchanger 20 electrically. The temperature controller 25 controls the heat exchanger 20 corresponding to the temperature of the sensor 10 and heats up or cools down the fluid to keep the temperature of the fluid fixed.