CLEAN ROOM

PROBLEM TO BE SOLVED: To provide a clean room, in which chemical substances are restrained to a limit. SOLUTION: The clean room, equipped with a measuring room A and an air-conditioning system B, is provided with an outside air treating unit 11 equipped with a chemical filter and a circulating air t...

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Bibliographic Details
Main Authors TAKAHASHI YUKINARI, SAKAE AKIO, ARAI YOSHINOBU, WAKUI ERIKO, ICHINO MASAYUKI, WAKUI TAKESHI, MIYOSHI KOICHI
Format Patent
LanguageEnglish
Published 19.04.2002
Edition7
Subjects
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
RANGES
VENTILATING
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To provide a clean room, in which chemical substances are restrained to a limit. SOLUTION: The clean room, equipped with a measuring room A and an air-conditioning system B, is provided with an outside air treating unit 11 equipped with a chemical filter and a circulating air treating unit 35 in the air-conditioning system B. The outside air treating unit 11 is provided at the introducing port of outside air while the circulating air treating unit 35 is provided in a ventilating air passage section for supplying outside air introduced through the outside air treating unit 11 and air extracted out of the inside of the measuring room A into the measuring room A. An air-conditioning unit 21, regulating the temperature and humidity of the outside air, introduced from the outside air treating unit 11, and the air, extracted out of the inside of the measuring room A, is provided between the outside air treating unit 11 and the circulating air treating unit 35. In this case, the exposed surfaces of the measuring room A, the ventilating passage and equipment provided in the ventilating passage are constituted of a stainless steel.
Bibliography:Application Number: JP20000305699