METHOD FOR MANUFACTURING LEAD-CONTAINING PEROVSKITE TYPE COMPOUND OXIDE SINTERED COMPACT

• Main Authors: TABUCHI MITSUHARU, ICHIKAWA KIYOSHI, TOKITA MASAO, KAWAHARA MASAKAZU, MIYAMOTO SHINICHI, NAKAYAMA YUKIHIRO, TAKEUCHI TOMONARI, ATO KAZUAKI, KAGEYAMA HIROYUKI
• Format: Patent
• Language: English
• Published: 27.03.2002
• Edition: 7
• Subjects: ARTIFICIAL STONE; CEMENTS; CERAMICS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIME, MAGNESIA; METALLURGY; REFRACTORIES; SLAG; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; TREATMENT OF NATURAL STONE

PROBLEM TO BE SOLVED: To produce lead-containing perovskite type compound oxide sintered compact of large size and high density which can be used as a sputtering target in a short time and with stability. SOLUTION: A method for manufacturing the lead-containing pervoskite type compound oxide sintered compact is distinguished by using lead-containing perovskite type compound oxide powder having <1 μm average grain size and >=0.1 μm standard deviation of grain size distribution as a raw material and subjecting to energizing sintering by applying DC pulse current under pressure.