ARMATURE UNIT, ELECTROMAGNETIC ACTUATOR, STAGE EQUIPMENT AND METHOD FOR MANUFACTURING DEVICE USING THEM

• Main Author: KIKUCHI TOSHIHIDE
• Format: Patent
• Language: English
• Published: 15.03.2002
• Edition: 7
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; CINEMATOGRAPHY; CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DYNAMO-ELECTRIC MACHINES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; GENERATION; HOLOGRAPHY; INSTRUMENT DETAILS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PRINTED CIRCUITS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To enable high-precision temperature control by suppressing the local temperature increase of an electromagnetic actuator, without having to increase the pressure of a cooling medium or without making a passage larger. SOLUTION: A linear motor 100 is provided with a first housing 111, in which coils 112 are arranged, a second housing 140 in which a first passage 143 for the cooling medium is formed, and an auxiliary cooling system 150 which connects the first housing 111; and the second housing 140. Flat mesh boards 152 fitted to one end of each cooling bar 151 of the cooling system 150 are connected to the coils 112, and radiating fins fitted to the other end are arranged inside the first passage 143 of the second housing 40.