CORROSION-RESISTANT CERAMICS AND CORROSION-RESISTANT MEMBER USING THE SAME
PROBLEM TO BE SOLVED: To provide corrosion-resistant ceramics which has stable and high corrosion resistance to a halogenous corrosive gas or halogenous plasma and to provide a corrosion-resistant member using the corrosion-resistant ceramics. SOLUTION: This corrosion-resistant ceramics is based on...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English |
Published |
08.03.2002
|
Edition | 7 |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | PROBLEM TO BE SOLVED: To provide corrosion-resistant ceramics which has stable and high corrosion resistance to a halogenous corrosive gas or halogenous plasma and to provide a corrosion-resistant member using the corrosion-resistant ceramics. SOLUTION: This corrosion-resistant ceramics is based on MgO and Al2O3 and has 5 or smaller product of the porosity (%) and the average particle size (μm). |
---|---|
Bibliography: | Application Number: JP20000265166 |