CORROSION-RESISTANT CERAMICS AND CORROSION-RESISTANT MEMBER USING THE SAME

PROBLEM TO BE SOLVED: To provide corrosion-resistant ceramics which has stable and high corrosion resistance to a halogenous corrosive gas or halogenous plasma and to provide a corrosion-resistant member using the corrosion-resistant ceramics. SOLUTION: This corrosion-resistant ceramics is based on...

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Bibliographic Details
Main Authors WADA CHIHARU, OGURA TOMOYUKI
Format Patent
LanguageEnglish
Published 08.03.2002
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide corrosion-resistant ceramics which has stable and high corrosion resistance to a halogenous corrosive gas or halogenous plasma and to provide a corrosion-resistant member using the corrosion-resistant ceramics. SOLUTION: This corrosion-resistant ceramics is based on MgO and Al2O3 and has 5 or smaller product of the porosity (%) and the average particle size (μm).
Bibliography:Application Number: JP20000265166