FIXING DEVICE FOR CONVEYING TRUCK

PROBLEM TO BE SOLVED: To provide a fixing device for easily and securely fixing a conveying truck, for use in conveying semiconductor substrates between processing devices, to the processing devices to which the truck is fixed. SOLUTION: The fixing device for the conveying truck fixes the conveying...

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Bibliographic Details
Main Authors ADACHI TSUKASA, YASUDA AKIHIRO, TAKAYAMA YUKIO
Format Patent
LanguageEnglish
Published 26.02.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND-PROPELLED VEHICLES, e.g. HAND CARTS, PERAMBULATORS
HANDLING THIN OR FILAMENTARY MATERIAL
LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
SLEDGES
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a fixing device for easily and securely fixing a conveying truck, for use in conveying semiconductor substrates between processing devices, to the processing devices to which the truck is fixed. SOLUTION: The fixing device for the conveying truck fixes the conveying truck 11 to semiconductor fabrication devices 12. The conveying truck 11 is provided with a fixing mechanism 15 and each semiconductor fabrication device 12 is provided with a flange 25. The flange 25 includes a pin 27 stood on a body portion 26, and an engagement hole 28 formed in the body portion 26. The fixing mechanism 15 includes a positioning hook 36 for positioning the truck 11 relative to each fabrication device 12 by engaging the pin 27 formed on the flange 25, and another positioning hook 36 for fixing the truck 11 to each fabrication device 12 (flange 25) by engaging the engagement hole 28 formed in the flange 25.
Bibliography:Application Number: JP20000248926