RESISTANCE ELEMENT FOR MONITOR AND METHOD FOR MEASURING RELATIVE ACCURACY OF RESISTANCE ELEMENT

PROBLEM TO BE SOLVED: To provide a resistance element for a monitor and a method for measuring a relative accuracy of the resistance element capable of accurately and efficiently measuring (even a semiconductor integrated circuit board state or a product state), and reducing the cost of an integrate...

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Bibliographic Details
Main Author INOUE ITARU
Format Patent
LanguageEnglish
Published 14.12.2001
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide a resistance element for a monitor and a method for measuring a relative accuracy of the resistance element capable of accurately and efficiently measuring (even a semiconductor integrated circuit board state or a product state), and reducing the cost of an integrated circuit chip by suppressing increase in area of the chip for relatively accurately measuring the element. SOLUTION: In the resistance element for the monitor, a plurality of the resistance elements (1, 2) formed by the same manufacturing steps as those of a real circuit in the integrated circuit chip are connected to power source pads (3, 4, 5 and 6) of terminal pads formed in the chip. The method for measuring the relative accuracy of the resistance element comprises the steps of using the pads (3, 4, 5 and 6) of terminal pads formed in the chip connected to the elements (1, 2) as measuring pads when measuring the relative accuracy of the elements (1, 2) formed in the chip.
Bibliography:Application Number: JP20000166218