LASER BEAM MACHINING DEVICE

PROBLEM TO BE SOLVED: To provide a laser beam machining device having high degree of freedom of a processing pattern, where the improvement in use efficiency of readout light can be attained. SOLUTION: The laser beam machining device 10 is provided with a reflection type space optical modulator 20,...

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Bibliographic Details
Main Authors FUKUCHI NORIO, IGASAKI YASUNORI, HARA TSUTOMU, HIRUMA TERUO
Format Patent
LanguageEnglish
Published 05.10.2001
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide a laser beam machining device having high degree of freedom of a processing pattern, where the improvement in use efficiency of readout light can be attained. SOLUTION: The laser beam machining device 10 is provided with a reflection type space optical modulator 20, a hologram pattern writing means 40 for writing a hologram pattern in the reflection type optical light modulator 20, a projection means 50 for being made incident readout light on the reflection type optical light modulator 20 and a Fourier lens 60 for performing the Fourier transform of the readout light in which phase modulation is performed in the reflection type space optical modulator 20.
Bibliography:Application Number: JP20000319594