SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND METHOD OF DETECTING FAILURE USING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

• Main Authors: MURATA SHIGEHARU, HOSOE HIDEYUKI
• Format: Patent
• Language: English
• Published: 31.08.2001
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To facilitate detecting failures of highly integrated and area-increased semiconductor integrated circuit devices. SOLUTION: The semiconductor integrated circuit device having a test pattern capable of detecting disconnection failures and short circuit failures of metal wirings formed on a TEG-mounting semiconductor substrate comprises a failure detecting gate circuit comprising many failure detecting parts FA1 connected like a matrix in directions of rows X, Y, X-row selector XS1 and Y-row selector YS1 for selecting one of the failure detector circuits by a select signal as a target for detecting failures, a decoder circuit for generating data signals for detecting the wire breaking failures and the short circuit failures, data signal lines IX101-IX128 for inputting the failure detecting data signals, detection data output lines OY1-OY32 for outputting the failure detection results from the failure detecting gate circuit, X-row select signal lines XSOX1-XSOX6 for selecting data signals inputted to the failure detecting gate circuits, Y-row select signal lines XSOY1-XSOY6 for selecting the failure detection results outputted from the failure detecting gate circuits, and data output lines XOX1, XOY1 for outputting inputted data signals and outputted failure detection results.