MANUFACTURING METHOD OF TRIPOLAR FIELD-EMISSION ELEMENT USING CARBON NANOTUBE

• Main Authors: LEE NAE-SUNG, KIM JONG-MIN, RI KOU, SAI RYUSHU
• Format: Patent
• Language: English
• Published: 31.08.2001
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS THEREOF; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a manufacturing method of a tripolar field-emission element using carbon nanotubes, superior in electron emission characteristics. SOLUTION: In this manufacturing method, catalyst layers 9 are formed on a cathode 2, in a state with or without forming a base layer, and carbon nanotubes 10 are grown on the catalyst layers by Spint method. On the catalyst layer 9' outside a micro cavity 6, a nonreactive layer 77 is formed, and only on the catalyst layer 9 inside the micro cavity 6, carbon nanotubes are grown. In this way, even when a separation layer 7 is etched and removed, due to the nonexistence of outside carbon nanotubes, carbon nanotubes will not flow into the micro-cavity 6. Thus, this method has an advantage of increasing production yield and reducing manufacturing cost.