PIEZOELECTRIC MULTI-AXIAL ACCELERATION SENSOR

PROBLEM TO BE SOLVED: To obtain a piezoelectric multi-axial acceleration sensor which does not require the adjustment of the level fluctuations of X-, Y-, and Z-axis acceleration signals by means of a signal amplifier circuit. SOLUTION: The acceleration detecting electrode pattern E1 and counter ele...

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Bibliographic Details
Main Authors TAMURA MASAHIDE, ANDO MASATO, SAWAI TSUTOMU, NAKAMIZO YOSHIYUKI, HIROSE SHIGERU
Format Patent
LanguageEnglish
Published 03.08.2001
Edition7
Subjects
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To obtain a piezoelectric multi-axial acceleration sensor which does not require the adjustment of the level fluctuations of X-, Y-, and Z-axis acceleration signals by means of a signal amplifier circuit. SOLUTION: The acceleration detecting electrode pattern E1 and counter electrode pattern E0 of this acceleration sensor are formed of conductive thin films formed by a thin film forming technique, such as the vapor deposition, sputtering, etc. Between the connecting lines L1-L5 and piezoelectric ceramic substrate 7a of the sensor, in addition, thin layers 27, 29, and 31 having low dielectric constants are formed by spin coating a resin.
Bibliography:Application Number: JP20000020251