METHOD FOR WORKING DISK MEDIUM AND JIG FOR CLAMPING DISK SUBSTRATE
PROBLEM TO BE SOLVED: To improve the quality and yield of a disk medium by making it possible to handle a jig without contact with the outer peripheral edge of a disk substrate and evading the direct contact of a chuck of a working machine with the inner peripheral edge of the disk during respective...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
19.07.2001
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To improve the quality and yield of a disk medium by making it possible to handle a jig without contact with the outer peripheral edge of a disk substrate and evading the direct contact of a chuck of a working machine with the inner peripheral edge of the disk during respective working processes. SOLUTION: An attachable and detachable bushing 6 is mounted at a central hole 1a of the disk as the jig for clamping the disk substrate 1 in an initial stage of feeding the disk substrate to a manufacturing stage for the disk medium and in this state, handling of the disk substrate via this bushing, the transfer of a cassette between the stages and the operation of chucking to the working machine, inspection and testing devices are carried out without touching the disk at all. The bushing is removed from the disk in the step when the processing in the respective stages is completed and thereafter the bushing is again mounted to the disk substrate and is repetitively used. |
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Bibliography: | Application Number: JP20000003322 |