DIAMOND PELLET TYPE HIGH DENSITY STICKING CORRECTION CARRIER

PROBLEM TO BE SOLVED: To provide a method of improving a flatness and a life of a pad sticking surface plate and processing highly precisely a work. SOLUTION: In a method of correcting flatness of a pad stuck on a surface plate of a precise plane surface polishing device for plane surface processing...

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Bibliographic Details
Main Authors IENAKA HIDEKI, TOYODA KAZUHIKO, AOKI TOSHIMORI, ISODA YOSHIHIKO
Format Patent
LanguageEnglish
Published 03.07.2001
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a method of improving a flatness and a life of a pad sticking surface plate and processing highly precisely a work. SOLUTION: In a method of correcting flatness of a pad stuck on a surface plate of a precise plane surface polishing device for plane surface processing by a correction carrier, diamond pellets 2 are stuck on a correction carrier parent body 1 in a high density condition.
Bibliography:Application Number: JP19990377036