REFLECTION TYPE LIGHT BEAM SCANNER

PROBLEM TO BE SOLVED: To provide a reflection type light beam scanner which can perform high-speed drawing without lowering the optical performance. SOLUTION: The reflection type light beam scanner 12 is equipped with a light beam emission source 14, a polygon mirror unit 20, an fθlens 24 which pass...

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Bibliographic Details
Main Authors MORITA TAKU, OGUCHI AKIHIKO
Format Patent
LanguageEnglish
Published 22.06.2001
Edition7
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:PROBLEM TO BE SOLVED: To provide a reflection type light beam scanner which can perform high-speed drawing without lowering the optical performance. SOLUTION: The reflection type light beam scanner 12 is equipped with a light beam emission source 14, a polygon mirror unit 20, an fθlens 24 which passes the light beam reflected by the polygon mirror 20, and a mirror 22 which is arranged halfway in the optical path between the polygon mirror unit 20 and fθ lens 24. The mirror 22 is arranged behind the polygon mirror 16 in the irradiation direction of the light beam irradiation main axis AX and the fθlens 24 is arranged right above the polygon mirror unit. The polygon mirror unit 20 is arranged in a chamber 40, which has a circumferential wall 42 and a ceiling wall 44. The ceiling wall 44 is formed of a metallic plate 52 with high heat emissivity. The fθlens 24 is arranged above the metallic plate 52.
Bibliography:Application Number: JP19990351071