WASHING METHOD, WASHING AND DRYING METHOD AND WORK FEED APPARATUS
PROBLEM TO BE SOLVED: To wash a flat plate-shaped work such as a magnetic disk or the like to a high washing degree. SOLUTION: A plurality of untreated works W are respectively mounted on holding members 32 for holding the works W through the through-holes of them and fed in washing treatment tanks...
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Main Author | |
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Format | Patent |
Language | English |
Published |
19.06.2001
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To wash a flat plate-shaped work such as a magnetic disk or the like to a high washing degree. SOLUTION: A plurality of untreated works W are respectively mounted on holding members 32 for holding the works W through the through-holes of them and fed in washing treatment tanks 14a-14f while held by the holding members 32 to be washed and the washed works W are fed in a drying treatment tank 15 while held by the holding members 32 to be dried and the dried works W are detached from the holding members 32. The works W are fed in such a state that they are held through the through-holes thereof by the holding members 32 to be washed and dried. At a time of washing, a washing liquid is directly sprayed on the surfaces of the works W and, at a time of drying, the works W are directly exposed to a drying atmosphere. |
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Bibliography: | Application Number: JP19990349631 |