SURFACE TREATED METALLIC MEMBER HAVING SURFACE TREATMENT LAYER EXCELLENT IN ADHESION, SURFACE TREATMENT METHOD THEREFOR, AND ROTARY EQUIPMENT MEMBER USING THE SURFACE TREATMENT METHOD

• Main Authors: TAMAI KEIZO, FUKADA KAZUNORI
• Format: Patent
• Language: English
• Published: 05.06.2001
• Edition: 7
• Subjects: BLASTING; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ENGINE PLANTS IN GENERAL; HEATING; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; LIGHTING; MACHINES OR ENGINES IN GENERAL; MECHANICAL ENGINEERING; METALLURGY; ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES; STEAM ENGINES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; WEAPONS

PROBLEM TO BE SOLVED: To provide a surface treated metallic member excellent in adhesion between a metallic member as a base material and a surface treatment layer formed on its surface and also in the wear resistance of the surface treatment layer, a surface treatment method therefor, and a rotary equipment member using the surface treatment method. SOLUTION: A surface treatment layer, consisting of a nitrided layer 3 and a DLC layer 4 formed on the nitrided layer, or a surface treatment layer, consisting of the nitrided layer, an intermediate layer 5 composed of tungsten and/or tungsten carbide and formed on the nitrided layer, and a DLC layer 4 formed on the layer 5, is formed on the surface of a metallic member.