DRESSER AND ITS MANUFACTURING METHOD
PROBLEM TO BE SOLVED: To provide a diamond dresser and its manufacturing method capable of performing dressiog of a polishing pad efficiently and involving no risk of slipping-off of diamond abrasive grains resulting from elusion of a binder nor of generating scratches at a wafer surface. SOLUTION:...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
22.05.2001
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Abstract | PROBLEM TO BE SOLVED: To provide a diamond dresser and its manufacturing method capable of performing dressiog of a polishing pad efficiently and involving no risk of slipping-off of diamond abrasive grains resulting from elusion of a binder nor of generating scratches at a wafer surface. SOLUTION: TiN or TiC is used as the main component of a binder for a super-abrasive grain layer. When this is used to diamond dresser for CMP, the TiN or TiC content should preferably be not less than, 90% because not only a grain retaining force but an anti-corrosion property is of important as the properties required of the binder. |
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AbstractList | PROBLEM TO BE SOLVED: To provide a diamond dresser and its manufacturing method capable of performing dressiog of a polishing pad efficiently and involving no risk of slipping-off of diamond abrasive grains resulting from elusion of a binder nor of generating scratches at a wafer surface. SOLUTION: TiN or TiC is used as the main component of a binder for a super-abrasive grain layer. When this is used to diamond dresser for CMP, the TiN or TiC content should preferably be not less than, 90% because not only a grain retaining force but an anti-corrosion property is of important as the properties required of the binder. |
Author | KADOMURA KAZUNORI TAKADA ATSUSHI |
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Snippet | PROBLEM TO BE SOLVED: To provide a diamond dresser and its manufacturing method capable of performing dressiog of a polishing pad efficiently and involving no... |
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SubjectTerms | DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING |
Title | DRESSER AND ITS MANUFACTURING METHOD |
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