METHOD AND APPARATUS FOR INSPECTION COLOR UNEVENNESS DEFECT

PROBLEM TO BE SOLVED: To correctly inspect color unevenness because of the nonuniformity of open areas of a cyclic opening pattern in a short time and over an entire pattern form region. SOLUTION: In inspecting the color unevenness of a cyclic pattern based on permeability images obtained by picking...

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Bibliographic Details
Main Authors OKAZAWA ATSUSHI, CHINJU TAKUTETSU, NISHIDA MASASHI, SOEDA MASAHIKO
Format Patent
LanguageEnglish
Published 20.04.2001
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To correctly inspect color unevenness because of the nonuniformity of open areas of a cyclic opening pattern in a short time and over an entire pattern form region. SOLUTION: In inspecting the color unevenness of a cyclic pattern based on permeability images obtained by picking up an object, a luminance inverted image with a luminance of the permeability image inverted is formed. At least, either of the luminance inverted image and the permeability image is processed by a recess binarization in directions from up to down, from down to up, from left to right and from right to left, thereby forming up, down, left and right recess binary images. The up and down recess binary images are synthesized, and the left and right recess binary images are synthesized, thereby forming two, i.e., up and down, and right and left recess binary images. An up and down, and a right and left judgment images are formed from the up and down, and the right and left recess binary images. A color unevenness defect is finally judged on the basis of the judgment images.
Bibliography:Application Number: JP19990289451