MAGNETIC DISK SUBSTRATE FLOATING AND HOLDING METHOD AND HOLDING DEVICE FOR TRANSFERRING MAGNETIC DISK SUBSTRATE USED FOR THE METHOD

PROBLEM TO BE SOLVED: To provide a magnetic disk substrate floating and holding method and a holding device for transferring magnetic disk substrate used for the method allowing a magnetic disk substrate fitted closely onto a grinding wheel of a plate grinding machine to be separated easily so as to...

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Bibliographic Details
Main Authors NAGAI KIYOSATO, YOSHIDA MINORU, WADA TOSHIRO
Format Patent
LanguageEnglish
Published 03.04.2001
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To provide a magnetic disk substrate floating and holding method and a holding device for transferring magnetic disk substrate used for the method allowing a magnetic disk substrate fitted closely onto a grinding wheel of a plate grinding machine to be separated easily so as to transfer the substrate to the next process such as washing process. SOLUTION: A method for floating and holding a magnetic disk substrate 2 fitted closely onto a plate grinding wheel 3 comprises the steps of floating the magnetic disk substrate 3 by spraying air into a boundary portion 4 between the magnetic disk substrate 2 and the flat grinding wheel 3, and holding the floated magnetic disk substrate 2 by a holding device 1 for transferring the magnetic disk substrate. In addition, a holding device 1 comprises a blowing port 5 for spraying air to the boundary portion 4 between the magnetic disk substrate 2 and the plate grinding wheel 3.
Bibliography:Application Number: JP19990265880