TURBO MOLECULAR PUMP

PROBLEM TO BE SOLVED: To assure a safety so that a stator is not damaged by forming at least a partial space between a stator structural body and a casing part so as to stop that an impact is transmitted directly from the stator structural body to the casing part when an abnormal torque occurs. SOLU...

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Bibliographic Details
Main Authors OGAMINO HIROAKI, MIYAMOTO MATSUTARO
Format Patent
LanguageEnglish
Published 27.03.2001
Edition7
Subjects
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
NON-POSITIVE DISPLACEMENT PUMPS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To assure a safety so that a stator is not damaged by forming at least a partial space between a stator structural body and a casing part so as to stop that an impact is transmitted directly from the stator structural body to the casing part when an abnormal torque occurs. SOLUTION: The outside diameter of an inside casing 142 is set smaller than the inside diameter of a pump casing 14 so as to form a clearance T between the inside casing 142 and the pump casing 14. The inside casing 142 comprises an inner peripheral lower end part fitted to the outer peripheral surface of a cylindrical large diameter part 145a formed in a fixed cylindrical part 145 of a stator S, and is fixed only by the fitting at this portion. Thus, when an abnormal torque is transmitted to a fixed vane 32 and a lower inner side casing (thread groove part spacer) 140, the inside casing 142 is rotated together to absorb an impact so that the impact is hard to be given to the fixed side, particularly, to the pump casing 14.
Bibliography:Application Number: JP20000040325