OPTICAL DEVICE ASSEMBLY METHOD, EXPOSURE DEVICE ASSEMBLY METHOD USING IT, OPTICAL DEVICE ASSEMBLY DEVICE AND EXPOSURE DEVICE ASSEMBLY DEVICE USING IT

PROBLEM TO BE SOLVED: To enable even a large-sized optical member to be easily and accurately positioned and assembled as for the assembly method of an optical device, the assembly method of an exposure device using it, the assembly device of the optical device and the assembly device of the exposur...

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Bibliographic Details
Main Author SAWADA HIDEJI
Format Patent
LanguageEnglish
Published 27.02.2001
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:PROBLEM TO BE SOLVED: To enable even a large-sized optical member to be easily and accurately positioned and assembled as for the assembly method of an optical device, the assembly method of an exposure device using it, the assembly device of the optical device and the assembly device of the exposure device using it. SOLUTION: Since the optical member D2 is positioned on a condition that the load thereof imposed on the other member D1 is reduced, friction occurring between the optical member and the other member because of the load of the optical member is also reduced. Thus, the optical member can be easily relatively moved with respect to the other member.
Bibliography:Application Number: JP19990232021