METHOD AND SYSTEM FOR AUTOMATING SEMICONDUCTOR FACTORY

• Main Authors: HONG CHANGKI, CHAE YUNG-HWAN, CHO WON-SOO, LEE TAE-HO, KIM MOON-GI, LEE WOO-KYU, KIM JIN-SUN, LEE KWANG-HO, AHN JONG-MO
• Format: Patent
• Language: English
• Published: 26.12.2000
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HANDLING THIN OR FILAMENTARY MATERIAL; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PACKING; PERFORMING OPERATIONS; PHYSICS; PNEUMATIC TUBE CONVEYORS; REGULATING; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

PROBLEM TO BE SOLVED: To shorten a time required for transporting a semiconductor wafer by transferring, transportation order to one of multiple transportation means and to one of multiple stocker means at the same time, so that every one of transportation means and stockers is activated. SOLUTION: An EQ36 transfers a cassette transportation request after processing the lot of a semiconductor wafer. A CMS104 generates a transportation order in response to the cassette transportation request. If a semiconductor wafer cassette is transferred from an EQ136 to a stocker 124 or 126 by AGV132, a transportation control part 116 transfers the transportation order to the AGV132 and the stocker 124 or 126 at the same time, so that the AGV132 and the stocker 124 or 126 are activated at the same time. The stocker 124 or 126 transfers the cassette transportation request to the AGV132. If the semiconductor wafer cassette is transported from the stocker 124 or 126 to the EQ136 by the AGV132, the transportation control part 116 transfers the transportation order to the AGV132 and EQ136 at the same time, for activation of them.