STAGE DEVICE AND ALIGNER

PROBLEM TO BE SOLVED: To make it possible to obtain the strong thrust of the electromagnetic actuator of a stage device without increasing the heating value of the actuator, by a method wherein the stage device is provided with a control unit, by which a current is made to flow to the coils selected...

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Bibliographic Details
Main Author KIKUCHI TOSHIHIDE
Format Patent
LanguageEnglish
Published 15.12.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRICITY
INDUCTANCES
MAGNETS
SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
TRANSFORMERS
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Summary:PROBLEM TO BE SOLVED: To make it possible to obtain the strong thrust of the electromagnetic actuator of a stage device without increasing the heating value of the actuator, by a method wherein the stage device is provided with a control unit, by which a current is made to flow to the coils selected from among a plurality of element coils according to the position of a stage. SOLUTION: An element coil group 84A is divided into a plurality of units 84#1, 84#2,..., which respectively consist of 6 element coils 84Ai, and a stage control unit 68 changes the element coils 84Ai to which currents are made to flow for respective units. The current is made to flow to the coils only selected from among the coils of the group 84A according to the position of a wafer stage. The selection of the coils to respond to the position of the stage is made on the basis of the detected value detected by a position detecting unit for detecting the position of the stage. As the position detecting unit, a laser interferrometer 44 for measuring the X coordinate is used and in a linear motor for making the unit 68 drive in the Y direction, an interferrometer 46 for measuring the Y coordinate is used. As the element coils, flat coils are used.
Bibliography:Application Number: JP19990159247