SELF-EXCIATION AND SELF-DETECTION-TYPE PROBE AND SCANNING PROBE DEVICE

• Main Authors: SHIMIZU NOBUHIRO, SHIRAKAWABE YOSHIHARU, YASUMURO CHIAKI, TAKAHASHI HIROSHI, ARAI TADASHI
• Format: Patent
• Language: English
• Published: 30.11.2000
• Edition: 7
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS; TESTING

PROBLEM TO BE SOLVED: To obtain a self-detection-type probe which is of a self-excitation type and which can perform a measurement with high accuracy and to obtain a scanning probe device which uses the probe. SOLUTION: In this scanning probe device, the lever 3 of a probe 1 is vibrated, and a sample is measured. A resistor 5 is installed at the lever 3, a periodic bias signal is applied to the resistor 5, the lever 3 is vibrated without being excited from the outside and the displacement of the lever 3 can be detected on the basis of a change, in the resistance of the resistor 5 which is generated at this time.