LASER OSCILLATION DEVICE, ALIGNER AND MANUFACTURE THEREOF

PROBLEM TO BE SOLVED: To provide a laser oscillation device with which the diffusion of a plasma grown on a slot can be suppressed and a uniform laser suppressing energy loss as much as possible can be emitted. SOLUTION: In this laser oscillation device, a plasma is grown by stimulating the laser ga...

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Bibliographic Details
Main Authors SUZUKI NOBUMASA, OMI TADAHIRO, OSAWA MASARU, SHINOHARA HISAKUNI, HIRAYAMA MASAKI, TANAKA NOBUYOSHI
Format Patent
LanguageEnglish
Published 14.09.2000
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
DEVICES USING STIMULATED EMISSION
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a laser oscillation device with which the diffusion of a plasma grown on a slot can be suppressed and a uniform laser suppressing energy loss as much as possible can be emitted. SOLUTION: In this laser oscillation device, a plasma is grown by stimulating the laser gas in a laser tube by introducing an electromagnetic wave through a plurality of microscopic gaps 10 formed on the wall of a waveguide 1. The width in short side direction of the microscopic gaps 10 is formed shorter than the thickness of the sheath which becomes the passage of the waveguide from the opening to the short side direction of the microscopic gaps.
Bibliography:Application Number: JP19990051813