ALUMINA CERAMIC SINTERED COMPACT HAVING EXCELLENT CORROSION RESISTANCE
PROBLEM TO BE SOLVED: To obtain an alumina sintered compact having excellent corrosion resistance (etching resistance) to both plasma irradiations with a fluorine base and a chlorine base. SOLUTION: This alumina ceramic sintered compact has >=99 wt.% alumina (Al2O3) content, 20-200 ppm Mg content...
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Main Author | |
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Format | Patent |
Language | English |
Published |
12.09.2000
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To obtain an alumina sintered compact having excellent corrosion resistance (etching resistance) to both plasma irradiations with a fluorine base and a chlorine base. SOLUTION: This alumina ceramic sintered compact has >=99 wt.% alumina (Al2O3) content, 20-200 ppm Mg content, by weight, and >=3.97 g/cm3 bulk density. Preferably, the content of metal components except Al and Mg is <=20 ppm as a single component and <=100 ppm per the total of the components. The ceramic may be a part of a portion to be subjected to plasma irradiation. |
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Bibliography: | Application Number: JP19990057565 |