ALUMINA CERAMIC SINTERED COMPACT HAVING EXCELLENT CORROSION RESISTANCE

PROBLEM TO BE SOLVED: To obtain an alumina sintered compact having excellent corrosion resistance (etching resistance) to both plasma irradiations with a fluorine base and a chlorine base. SOLUTION: This alumina ceramic sintered compact has >=99 wt.% alumina (Al2O3) content, 20-200 ppm Mg content...

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Bibliographic Details
Main Author YOSHITOMI YASUKI
Format Patent
LanguageEnglish
Published 12.09.2000
Edition7
Subjects
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Summary:PROBLEM TO BE SOLVED: To obtain an alumina sintered compact having excellent corrosion resistance (etching resistance) to both plasma irradiations with a fluorine base and a chlorine base. SOLUTION: This alumina ceramic sintered compact has >=99 wt.% alumina (Al2O3) content, 20-200 ppm Mg content, by weight, and >=3.97 g/cm3 bulk density. Preferably, the content of metal components except Al and Mg is <=20 ppm as a single component and <=100 ppm per the total of the components. The ceramic may be a part of a portion to be subjected to plasma irradiation.
Bibliography:Application Number: JP19990057565