TRANSFER METHOD AND APPARATUS
PROBLEM TO BE SOLVED: To highly accurately transfer a highly accurate and fine pattern formed on a transfer base to a base to be transferred. SOLUTION: A film-like transfer base 9 on the surface of which a highly accurate and fine pattern is formed and which is continuously delivered and a temporari...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
12.09.2000
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To highly accurately transfer a highly accurate and fine pattern formed on a transfer base to a base to be transferred. SOLUTION: A film-like transfer base 9 on the surface of which a highly accurate and fine pattern is formed and which is continuously delivered and a temporarily fixing stage 32 on which a base to be transferred is arranged are provided and tension adjusting rollers 23 making tension of the transfer base adjustable are provided on both sides of this temporarily fixing stage 32 and the above described tension is made to approximately the same as the tension during forming the pattern to bring the transfer base 9 and the base 35 to be transferred into tight contact with each other and to fix temporarily them. |
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Bibliography: | Application Number: JP19990051228 |