SILICON-CONTAINING RESIST COMPOSITION AND ITS USE

PROBLEM TO BE SOLVED: To obtain the negative tone resist composition comparatively high in silicon content and high in sensitivity and resolution by incorporating a silicon-containing polymer having a phenol group, soluble in an aqueous base, a cross-linking agent, an acid generator and a solvent, a...

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Bibliographic Details
Main Authors WILLIAM ROSS BRUNSFOLD, DAVID E ZEGER, DOUGLAS CHARLES RA TULIP JR, ARI AFUZAARI ARUDAKAANII, RIN CHIN FAN, KATNANI AHMAD D
Format Patent
LanguageEnglish
Published 11.08.2000
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To obtain the negative tone resist composition comparatively high in silicon content and high in sensitivity and resolution by incorporating a silicon-containing polymer having a phenol group, soluble in an aqueous base, a cross-linking agent, an acid generator and a solvent, and allowing the phenolic polymer containing silicon to have a specific structure. SOLUTION: The composition is a silicon-containing negative resist composition and contains a silicon-containing polymer having a phenol group, soluble in an aqueous base, a cross-linking agent capable of cross-linking the silicon- containing polymer at the sites of the phenolic hydroxyl group, an acid generator and a solvent. The silicon-containing phenolic polymer soluble in an aqueous basic solution has structures represented by the formula in which R1 is an acid-insensitive (inactive) blocking group; Z is an H atom or a -Si(CH3)3; and X is <=1 mol fraction. This silicon-containing polymer has an number average molecular weight of about 800-about 200,000.
Bibliography:Application Number: JP20000023822