DEVICE AND METHOD FOR CLEANING

PROBLEM TO BE SOLVED: To obtain a cleaning device and cleaning method capable of efficiently cleaning an object. SOLUTION: This cleaning device 10 comprises an object retaining part 20 for rotatably retaining an object W to be cleaned, a water supply part 30 for jetting water onto a surface of the o...

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Bibliographic Details
Main Authors TAMAOKI HIROYUKI, YOSHIOKA TETSUYA
Format Patent
LanguageEnglish
Published 16.06.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To obtain a cleaning device and cleaning method capable of efficiently cleaning an object. SOLUTION: This cleaning device 10 comprises an object retaining part 20 for rotatably retaining an object W to be cleaned, a water supply part 30 for jetting water onto a surface of the object W in order to clean a surface of the object W, and a rinse supply part 40 having a rinse nozzle for pumping a rinse to the surface of the object W in order to rinse the surface of the object W. In this case, prior to the object W being cleaned with water, after being cleaned with water, and while being cleaned with water, the rinse supply part 40 has a function of pumping the rinse onto the object W.
Bibliography:Application Number: JP19980335990