EVACUATION MECHANISM

• Main Authors: OZAWA MASAHITO, OSAWA SATORU, ISHIGAKI TSUNEO
• Format: Patent
• Language: English
• Published: 21.03.2000
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEMICONDUCTOR DEVICES; THEIR RELEVANT APPARATUS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide an evacuation mechanism which can spare a space by integrating a plurality of valves. SOLUTION: In an evacuation mechanism having a low vacuum pump for evacuating a chamber 2 from the atmospheric pressure to a medium vacuum and a high vacuum pump 10 for evacuating from a medium vacuum to a high vacuum, a large bore slide valve 8 having a valve body 48 which can move between a vale body housing chamber 42 and a valve box 40 is connected to the exhaust port side of the chamber 2, the high vacuum pump 10 is connected to the large bore discharge opening 34 of the slide valve 8, a second discharge opening 68 is formed in the partition wall 66 of the valve body housing chamber 42, a low vacuum valve 14 is connected to the second discharge opening, a high vacuum valve 16 is connected to the discharge opening of the high vacuum pump 10, and the discharge opening of the valve 14 and a turbo-pressure discharge protective valve 16 are made to communicate with the low vacuum pump. In this way, the valves of the slide valve 8 and the 101 vacuum valve 14 are integrated to save a space.