CONVEYER DEVICE AND CONVEYING METHOD

PROBLEM TO BE SOLVED: To obtain a high speed conveyer device and conveying method of double hand in a link system of high rigidity structure, without providing rate- determining even when a process time is shortened in a semiconductor manufacture device of multi-chamber system, increasing a number o...

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Bibliographic Details
Main Authors KASHIMA HIDEO, KANETOMO MASABUMI, MATSUMURA YASUHIDE
Format Patent
LanguageEnglish
Published 15.02.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
HANDLING THIN OR FILAMENTARY MATERIAL
MANIPULATORS
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To obtain a high speed conveyer device and conveying method of double hand in a link system of high rigidity structure, without providing rate- determining even when a process time is shortened in a semiconductor manufacture device of multi-chamber system, increasing a number of processing sheets and decreasing a number of component items. SOLUTION: A total of four second arms respectively of two second arms 32, 33 are mounted in a tip end of first arms 30, 31 of double hand, respectively one by one a total of two holders are mounted in a tip end of these right/left two arms, this structure is formed capable of selecting independently forward advancing action of these two second arms, and the structure is formed capable of forward advancing action of arbitrary one holder of the two holders. In this way, a conveying machine of high tact time can be obtained by generating a double hand in a wafer conveying system device of link system.
Bibliography:Application Number: JP19980210667