WORKPIECE HOLDER FOR POLISHING

• Main Authors: YASUDA TATSUSHI, HAMADA SHIGEJI
• Format: Patent
• Language: English
• Published: 15.02.2000
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a workpiece holder for polishing which obtains a workpiece having smaller peripheral sags or a so-called center-recessed condition than former holder has. SOLUTION: In this, workpiece holder for, a template 1 for openedly providing a recessed hole 1a fittedly engaged...