WORKPIECE HOLDER FOR POLISHING

PROBLEM TO BE SOLVED: To provide a workpiece holder for polishing which obtains a workpiece having smaller peripheral sags or a so-called center-recessed condition than former holder has. SOLUTION: In this, workpiece holder for, a template 1 for openedly providing a recessed hole 1a fittedly engaged...

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Bibliographic Details
Main Authors YASUDA TATSUSHI, HAMADA SHIGEJI
Format Patent
LanguageEnglish
Published 15.02.2000
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
DRESSING OR CONDITIONING OF ABRADING SURFACES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a workpiece holder for polishing which obtains a workpiece having smaller peripheral sags or a so-called center-recessed condition than former holder has. SOLUTION: In this, workpiece holder for, a template 1 for openedly providing a recessed hole 1a fittedly engaged by a workpiece, and a packing material 2 composed of an elastic body for holding the workpiece are fixed with each other. At that time, the recessed hole peripheral edge vicinities of the timplate 1 and the packing material 2 are formed, so that the unsteaby deformation of the packing material 2 in nearby the recessed hole periphery at the time of abrasion can be absorbed with each other.
Bibliography:Application Number: JP19980213177