Nucleo sensore micromeccanico per sensore inerziale

A micromechanical sensor core for an inertial sensor, having a movable seismic mass, a defined number of anchor elements, by which the seismic mass is fastened on a substrate, a defined number of stop devices fastened on the substrate for stopping the seismic mass, a first springy stop element, a se...

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Main Authors ULLRICH, GUENTHER-NINO-CARLO, GUENTHER, SEBASTIAN, GUGEL, DENIS, SIMONI, BARBARA, HOEPPNER, CHRISTIAN, HOEHR, TIMM, SEELHORST, JOHANNES
Format Patent
LanguageItalian
Published 08.02.2019
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Summary:A micromechanical sensor core for an inertial sensor, having a movable seismic mass, a defined number of anchor elements, by which the seismic mass is fastened on a substrate, a defined number of stop devices fastened on the substrate for stopping the seismic mass, a first springy stop element, a second springy stop element and a solid stop element being developed on the stop device. The stop elements are designed in such a way that the seismic mass is able to strike in succession against the first springy stop element, the second springy stop element and the solid stop element.
Bibliography:Application Number: IT20170091680