Time-domain optical metrology and inspection of semiconductor devices
A semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting a relevant and irrelevant portion of the time-domain representation, and determining one or more mea...
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Main Authors | , , , , , |
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Format | Patent |
Language | English Hebrew |
Published |
01.09.2023
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting a relevant and irrelevant portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the relevant portion of the time-domain representation. |
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Bibliography: | Application Number: IL20230304783 |