METHOD AND DEVICE FOR ATOMIZER PRODUCING OF HIGH-RATE ATOMIZING HIGH-PURE COMPOUND LAYERS

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Bibliographic Details
Main Authors VOGLER,GEROLD,DD, HEISIG,ULLRICH,DD, ELBINGER,GERMAN,DD, GOEDICKE,KLAUS,DD, WIEBICKE,GEORG,DD, PFEIL,GEORG,DD, DINTNER,HELMUT,DD, STEINHAUER,INGO,DD, HENNEBERGER,JUERGEN,DD
Format Patent
LanguageEnglish
Published 28.05.1986
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Bibliography:Application Number: HU19800000649