SYSTEMS FOR SELECTIVELY FEEDING CHUNK POLYSILICON OR GRANULAR POLYSILICON IN A CRYSTAL GROWTH CHAMBER

A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one o...

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Bibliographic Details
Main Authors JI, Jun Hwan, JUNG, UiSung, LEE, Young Jung, KIM, Sung-Jin, KOO, Tae Su, PARK, Seong Su, CHOI, Won-Jin, YUN, Seok Min
Format Patent
LanguageChinese
English
Published 11.10.2019
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Summary:A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.
Bibliography:Application Number: HK20180116356