Vacuum system apparatus and method
A vacuum system 1 comprising a vacuum pump 3 and a heat exchanger 7 for receiving a heat transfer gas, the heat exchanger thermally coupled to the vacuum pump to absorb thermal energy therefrom. The heat transfer gas may be a pump purge gas. The purge gas may be selectively supplied to the vacuum pu...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
19.01.2022
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Subjects | |
Online Access | Get full text |
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Summary: | A vacuum system 1 comprising a vacuum pump 3 and a heat exchanger 7 for receiving a heat transfer gas, the heat exchanger thermally coupled to the vacuum pump to absorb thermal energy therefrom. The heat transfer gas may be a pump purge gas. The purge gas may be selectively supplied to the vacuum pump or pump exhaust, the supply conditions being determined by a controller 31. The system may include a gas heater 11 disposed between the heat exchanger and gas outlet port, for heating the heat transfer fluid. The supply of gas may be controlled by a control valve 9, which may reduce supply of gas to reduce absorption of heat from the pump in response to a signal indicating the pump is operating in low load condition. The system may comprise a cooling block 39 configured to receive a liquid coolant, the block being independent of the heat exchanger. |
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Bibliography: | Application Number: GB20200008675 |