Optoelectronic device and method of manufacture thereof

The silicon-on-insulator platform includes: a silicon waveguide; a cavity having a sidewall which forms a connecting optical facet to the silicon waveguide; wherein a region of a bed of the cavity includes a heatsink structure 801a,b, a grating structure 103 and/or a heater structure 701a,b. The dev...

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Bibliographic Details
Main Authors Guomin Yu, Frank Peters, Charles Su-Chang Tsai, Henri Nykänen, Aaron John Zilkie
Format Patent
LanguageEnglish
Published 10.05.2023
Subjects
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
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Summary:The silicon-on-insulator platform includes: a silicon waveguide; a cavity having a sidewall which forms a connecting optical facet to the silicon waveguide; wherein a region of a bed of the cavity includes a heatsink structure 801a,b, a grating structure 103 and/or a heater structure 701a,b. The device eg a DFB laser may be assembled on the platform by microprinting a DFB laser device coupon into a recess formed in the surface of a silicon on insulator wafer such that a waveguide in the device coupon aligns with the silicon waveguide formed in the silicon on insulator layer. The cavity sidewalls may provide thermal isolation for the device coupon mounted in the cavity.
Bibliography:Application Number: GB20200008731