Method and optical sensor for determining at least one coordinate of at least one measurement object

An optical sensor illuminates, through a stop element 116, an object 112 and detects 120 the light reflected from that object. The sensor includes an optical element 112 which can focus the illumination beam at two or more focal points (f1, f2) along the optical axis. Apparatus 128, 130 is also prov...

Full description

Saved in:
Bibliographic Details
Main Authors Frank Holler, Christian Hembd
Format Patent
LanguageEnglish
Published 25.07.2018
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:An optical sensor illuminates, through a stop element 116, an object 112 and detects 120 the light reflected from that object. The sensor includes an optical element 112 which can focus the illumination beam at two or more focal points (f1, f2) along the optical axis. Apparatus 128, 130 is also provided to vary the lateral position of the optical axis relative to the object that is measured. For both focal points, intensity distributions are measured at at least two lateral positions and, from these intensity distributions, a coordinate (either along or transverse to the optical axis) is determined. This may be done by measuring the lateral gradient of the intensity distribution, which would be large near an edge of the object, if it lies in the focal plane and smaller if no edge is in the focal plane. The optical sensor may be a chromatically confocal sensor.
Bibliography:Application Number: GB20170019469