Ferro-electric capacitor modules, methods of manufacture and design structures

Ferro-electric capacitor modules, methods of manufacture and design structures. The method of manufacturing the ferro-electric capacitor includes forming a barrier layer on an insulator (18) layer of a CMOS structure (10). The method further includes forming a top plate (32) and a bottom plate (28)...

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Main Authors JEFFREY P GAMBINO, PAUL W PASTEL, WILLIAM J MURPHY, JAMES S NAKOS, MATTHEW D MOON, BRETT A PHILIPS
Format Patent
LanguageEnglish
Published 06.03.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Ferro-electric capacitor modules, methods of manufacture and design structures. The method of manufacturing the ferro-electric capacitor includes forming a barrier layer on an insulator (18) layer of a CMOS structure (10). The method further includes forming a top plate (32) and a bottom plate (28) over the barrier layer. The method further includes forming a ferro-electric material (30) between the top plate (32) and the bottom plate (28). The method further includes encapsulating the barrier layer, top plate (32), bottom plate (28) and ferro-electric material (30) with an encapsulating material (36). The method further includes forming contacts (20) to the top plate (32) and bottom plate (28), through the encapsulating material (36). At least the contact (20) to the top plate (32) and a contact (20) to a diffusion of the CMOS structure are in electrical connection through a common wire.
Bibliography:Application Number: GB20130000268