Semiconductor factory automation system and method for transporting semiconductor wafers

• Main Authors: WOO-KYU LEE, KWANG-HO LEE, JONG-MO AHN, JIN-SUN KIM, TAE-HO LEE, WON-SOO CHO, CHANG-KEE HONG, MOON-GI KIM, YUNG-HWAN CHAE
• Format: Patent
• Language: English
• Published: 13.08.2003
• Edition: 7
• Subjects: BASIC ELECTRIC ELEMENTS; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; HANDLING THIN OR FILAMENTARY MATERIAL; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PACKING; PERFORMING OPERATIONS; PHYSICS; PNEUMATIC TUBE CONVEYORS; REGULATING; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING