Molecular drag compressors having finned rotor construction
A molecular drag vacuum pumping stage includes a rotor disk 100 coupled to a drive shaft for rotation about an axis 110, a stator 102 disposed around the rotor disk 100, and a baffle 140-146. The stator 102 defines a channel having an inlet and an outlet, and the rotor disk 100 includes two or more...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
14.07.1999
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Edition | 6 |
Subjects | |
Online Access | Get full text |
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Summary: | A molecular drag vacuum pumping stage includes a rotor disk 100 coupled to a drive shaft for rotation about an axis 110, a stator 102 disposed around the rotor disk 100, and a baffle 140-146. The stator 102 defines a channel having an inlet and an outlet, and the rotor disk 100 includes two or more spaced-apart, circumferentially invariant fins 120-126 disposed in the channel. The fins 120-126 define one or more tangential flow subchannels, each connected to the inlet and the outlet. The baffles 140-146 and the fins 120-126 have complementary geometries, such that the baffle 140-146 substantially blocks the tangential flow subchannels. Gas is pumped through the tangential flow subchannels from the inlet to the outlet as the disk 100 rotates relative to the stator 102. The fins 120-126 provide increased exhaust pressure for a given configuration of the molecular drag vacuum pumping stage. The stator may have spaced-apart fins and the rotor may have a baffle (figs 10-14). The fins may extend axially (figs 8 and 9). |
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Bibliography: | Application Number: GB19980015502 |